Plasma deposition, treatment, and etching of polymers

Author(s)

• D'Agostino, Riccardo

Bibliographic Information

Plasma deposition, treatment, and etching of polymers

edited by Riccardo d'Agostino

（Plasma-materials interactions）

Academic Press, c1990

Note

Includes bibliographical references

Details

• NCID: BA11301909
• ISBN:
  • 0122004302
• LCCN: 89018267
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: xiii, 528 p.
• Size: 24 cm
• Classification:
  • LCC : TA455.P58
  • DC20 : 668.9
• Subject Headings:
  • LCSH : Polymers
  • LCSH : Plasma engineering
  • LCSH : Plasma etching
  • LCSH : Plasma polymerization
• Parent Bibliography ID:
  • BA0662742X