Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989
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Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989
North-Holland , Distributors for the U.S. and Canada, Elsevier Science Pub., 1990
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Kobe University Library for Science and Technology
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University of Miyazaki Library/ Library Director:Ikari Tetsuo図
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Includes bibliographical references and index