Polysilicon thin films and interfaces

著者

• Raicu, Bruha
• Kamins, Theodore I.
• Thompson, C. V. (Carl V.)

書誌事項

Polysilicon thin films and interfaces

editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson

（Materials Research Society symposium proceedings, v. 182）

Materials Research Society, c1990

注記

Proceedings of a symposium held April 17-19, 1990, San Francisco, California

Includes bibliographical references and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA11550288
• ISBN:
  • 1558990712
• LCCN: 90044401
• 出版国コード: us
• タイトル言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xiii, 403 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.15.S55
  • DC20 : 621.381/52
• 件名:
  • LCSH : Silicon -- Electric properties -- Congresses
  • LCSH : Integrated circuits -- Materials -- Congresses
  • LCSH : Thin film devices -- Congresses
• 親書誌ID:
  • BA00013775