Low temperature epitaxial growth of semiconductors

書誌事項

Low temperature epitaxial growth of semiconductors

edited by Takashi Hariu

World Scientific, c1991

大学図書館所蔵 件 / 12

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注記

Includes bibliographical references

内容説明・目次

内容説明

Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.

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