Low temperature epitaxial growth of semiconductors
著者
書誌事項
Low temperature epitaxial growth of semiconductors
World Scientific, c1991
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注記
Includes bibliographical references
内容説明・目次
内容説明
Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.
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