Handbook of semiconductor silicon technology

Author(s)

• O'Mara, William C.
• Herring, Robert B.
• Hunt, Lee P. (Lee Philip)

Bibliographic Information

Handbook of semiconductor silicon technology

edited by William C. O'Mara, Robert B. Herring, Lee Philip Hunt

（Materials science and process technology series）

Noyes Publications, c1990

Note

Includes bibliographical references

Details

• NCID: BA11661369
• ISBN:
  • 0815512376
• LCCN: 89077167
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J., U.S.A.
• Pages/Volumes: xx, 795 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Semiconductors -- Handbooks, manuals, etc
  • LCSH : Silicon crystals -- Handbooks, manuals, etc
• Parent Bibliography ID:
  • BA04523161