Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Bibyk, Steven B.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. High Temperature Materials Division

書誌事項

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

edited by Steven B. Bibyk ... [et al.] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions

（Proceedings / [Electrochemical Society], v. 89-7）

Electrochemical Society, c1989

タイトル別名

Silicon nitride and silicon dioxide thin insulating films

注記

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA11670133
• LCCN: 89083899
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vii, 455 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
  • DC20 : 621.381/52
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Electric insulators and insulation -- Thin films -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
• 親書誌ID:
  • BA01323290