Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors

著者

• Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors
• Pearton, S. J.
• Jones, K. S.
• Kapoor, Vikram J.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division

書誌事項

Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors

edited by S.J. Pearton, K.S. Jones, V.J. Kapoor ; [sponsored by the] Electronics and Dielectric Science and Technology divisions

（Proceedings / [Electrochemical Society], v. 90-13）

Electrochemical Society, c1990

タイトル別名

Ion implantation and dielectrics for elemental and compound semiconductors

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA1182183X
• LCCN: 90084034
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: viii, 472 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Ion implantation -- Congresses
  • LCSH : Dielectrics -- Congresses
• 親書誌ID:
  • BA01323290