Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology

著者

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Srinivasan, G. R.
• Plummer, J.
• Pantelides, S. T.
• Electrochemical Society. Dielectrics and Insulation Division

書誌事項

Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology

edited by G.R. Srinivasan, J. Plummer, S. T. Pantelides

（Proceedings / [Electrochemical Society], v. 91-4）

Electrochemical Society, c1990

注記

Spine title: Process physics and modeling in semiconductor technology

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA11822173
• LCCN: 90085817
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
• ページ数/冊数: x, 800 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52/011
• 件名:
  • LCSH : Semiconductors -- Mathematical models -- Congresses
• 親書誌ID:
  • BA01323290