Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology

Author(s)

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Srinivasan, G. R.
• Plummer, J.
• Pantelides, S. T.
• Electrochemical Society. Dielectrics and Insulation Division

Bibliographic Information

Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology

edited by G.R. Srinivasan, J. Plummer, S. T. Pantelides

（Proceedings / [Electrochemical Society], v. 91-4）

Electrochemical Society, c1990

Note

Spine title: Process physics and modeling in semiconductor technology

Includes bibliographical references

Details

• NCID: BA11822173
• LCCN: 90085817
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
• Pages/Volumes: x, 800 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52/011
• Subject Headings:
  • LCSH : Semiconductors -- Mathematical models -- Congresses
• Parent Bibliography ID:
  • BA01323290