Particle beam microanalysis : fundamentals, methods, and applications
著者
書誌事項
Particle beam microanalysis : fundamentals, methods, and applications
VCH, c1990
- : gw
- : us
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This is an account of all particle ray methods used in the analysis of materials and material treatment processes. This book describes the physical and technical fundamentals, development and function of the apparatus as well as the most important applications. The book is aimed at the practitioner and formula content has been kept to a minimum.
目次
- Fundamentals
- scanning electron microscopy
- transmission electron microscopy
- electron beam X-ray microanalysis
- auger electron microanalysis
- secondary ion mass spectrometry
- electron beam testing
- applications.
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