Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

著者

• Kolbesen, Bernd O.
• Mc Caughan, Daniel V.
• Vandervorst, Wilfried
• Electrochemical Society. Electronics Division
• European Solid State Device Research Conference
• Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation

書誌事項

Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

edited by Bernd O. Kolbesen, Daniel V. Mc Caughan, Wilfried Vandervorst ; [sponsored by the] Electronics Division

（Proceedings / [Electrochemical Society], v. 90-11）

Electrochemical Society, c1990

注記

"Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA11943418
• LCCN: 90081719
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
• ページ数/冊数: viii, 364 p.
• 大きさ: 23 cm
• 分類:
  • LCC : QD139.S44
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Analysis -- Congresses
• 親書誌ID:
  • BA01323290