IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '90 proceedings, September 11-12, l990, Danvers, Massachusetts
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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '90 proceedings, September 11-12, l990, Danvers, Massachusetts
Institute of Electrical and Electronics Engineers , Additional copies may be purchased from IEEE Service Center, c1990
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90CH29025
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"Theme: 'World-class manufacturing'"
Includes bibliographical references
"IEEE catalog number 90CH2902-5"--T.p. verso