Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.
著者
書誌事項
Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 190）
Materials Research Society, c1991
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内容説明・目次
内容説明
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
目次
- Preface
- Materials Research Society symposium proceedings
- Part I. Metals & Composites Processing
- Part II. Plasma Synthesis & Surface Modification
- Part III. Modeling and Diagnostics
- Part IV. Plasma Processing of Electronic Materials - Part I
- Part V. Plasma Processing of Electronic Materials - Part II
- Author index
- Subject index.
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