Tungsten and other advanced metals for ULSI applications 1990 : proceedings of the 1990 workshop held October 22-24, 1990, Dallas, Texas, U.S.A.

著者

• Smith, Gregory C.
• Blumenthal, Roc
• McConica, Carol C.
• Workshop on Tungsten and Other Advanced Metals for ULSI Applications
• Materials Research Society

書誌事項

Tungsten and other advanced metals for ULSI applications 1990 : proceedings of the 1990 workshop held October 22-24, 1990, Dallas, Texas, U.S.A.

sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and Texas Instrumets, Inc., Dallas, Texas ; editors: Gregory C. Smith, Roc Blumenthal ; associate editors: Carol M. McConica ... [et al.]

Materials Research Society, c1991

注記

Includes bibliography and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA12410604
• ISBN:
  • 1558991123
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xiii, 397 p.
• 大きさ: 24 cm