Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Author(s)

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Kapoor, Vikram J.
• Hankins, Kevin T.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 87-10）

Electrochemical Society), c1987

Other Title

Silicon nitride and silicon dioxide thin insulating films

Note

Spine title: Silicon nitride and silicon dioxide thin insulating films

Includes bibliographies and indexes

Details

• NCID: BA1260435X
• LCCN: 87082368
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ (10 S. Main St., Pennington 08534-2696
• Pages/Volumes: x, 550 p.
• Size: 23 cm
• Classification:
  • LCC : TK7872.T55
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
  • LCSH : Electric and insulation -- Thin films -- Congresses
• Parent Bibliography ID:
  • BA01323290