Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Kapoor, Vikram J.
• Hankins, Kevin T.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 87-10）

Electrochemical Society), c1987

タイトル別名

Silicon nitride and silicon dioxide thin insulating films

注記

Spine title: Silicon nitride and silicon dioxide thin insulating films

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA1260435X
• LCCN: 87082368
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ (10 S. Main St., Pennington 08534-2696
• ページ数/冊数: x, 550 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
  • DC19 : 621.381/73
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
  • LCSH : Electric and insulation -- Thin films -- Congresses
• 親書誌ID:
  • BA01323290