Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
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Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
(Materials Research Society symposium proceedings, v. 204)
Materials Research Society, c1991
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Includes bibliographical references and indexes
