Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
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Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1088）
SPIE, c1989
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Includes bibliographies and index
