Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California

Author(s)

Bibliographic Information

Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California

Murrae J. Bowden, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 771）

SPIE, c1987

  • pbk.

Available at  / 5 libraries

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Note

Includes bibliographies and index

Related Books： 1-1 of 1

  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA12853627
  • ISBN
    • 0892528060
  • LCCN
    87060739
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash., USA
  • Pages/Volumes
    vi, 367 p.
  • Size
    28 cm
  • Classification
  • Subject Headings
  • Parent Bibliography ID
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