Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
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Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 775）
SPIE--the International Society for Optical Engineering, c1987
- pbk.
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Includes bibliographical references and index