Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Author(s)
Bibliographic Information
Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 775)
SPIE--the International Society for Optical Engineering, c1987
- pbk.
Available at / 5 libraries
-
No Libraries matched.
- Remove all filters.
Note
Includes bibliographical references and index