Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida

Author(s)

• Mukherjee, Sayan D.
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

Bibliographic Information

Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida

Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 797）

SPIE, c1987

• pbk.

Note

Includes biblographies

• NCID: BA13205280
• ISBN:
  • 089252832X
• LCCN: 87061010
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: x, 366 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X