Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida

著者

• Mukherjee, Sayan D.
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

書誌事項

Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida

Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 797）

SPIE, c1987

• pbk.

注記

Includes biblographies

詳細情報

• NII書誌ID(NCID): BA13205280
• ISBN:
  • 089252832X
• LCCN: 87061010
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: x, 366 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X