Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

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Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

O.J. Glembocki, Fred H. Pollak, J.J. Song,chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 794）

SPIE, 1987

  • pbk.

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Includes bibliographies and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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