Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

著者

• Glembocki, Orest J.
• Pollak, Fred H.
• Song, J. J.
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

書誌事項

Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

O.J. Glembocki, Fred H. Pollak, J.J. Song,chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 794）

SPIE, 1987

• pbk.

注記

Includes bibliographies and index

• NII書誌ID(NCID): BA13205462
• ISBN:
  • 089252829X
• LCCN: 87061007
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 282 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.T55
  • DC19 : 621.381/7
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Thin films -- Optical properties -- Congresses
• 親書誌ID:
  • BA0022700X