Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

Author(s)

• Glembocki, Orest J.
• Pollak, Fred H.
• Song, J. J.
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

Bibliographic Information

Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

O.J. Glembocki, Fred H. Pollak, J.J. Song,chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 794）

SPIE, 1987

• pbk.

Note

Includes bibliographies and index

• NCID: BA13205462
• ISBN:
  • 089252829X
• LCCN: 87061007
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 282 p.
• Size: 28 cm
• Classification:
  • LCC : TK7872.T55
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Thin films -- Optical properties -- Congresses
• Parent Bibliography ID:
  • BA0022700X