Proceedings of the Sixth Symposium on Automated Circuits Manufacturing

著者

• Symposium on Automated Integrated Circuits Manufacturing
• Akins, Vaughn E.
• Harada, Hiroyuki
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the Sixth Symposium on Automated Circuits Manufacturing

edited by Vaughn E. Akins, Hiroyuki Harada ; assistant editors, Robert Miller, Mihir Parikh

（Proceedings / [Electrochemical Society], v. 91-5）

Electrochemical Society, c1991

タイトル別名

Automated integrated circuits manufacturing

注記

"[Sponsored by] Electronics and Dielectric Science and Technology Divisions."

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA13247349
• LCCN: 91070972
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
• ページ数/冊数: vii, 413 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Data processing -- Congresses
  • LCSH : Computer integrated manufacturing systems -- Congresses
  • LCSH : Electronic industries -- Automation -- Congresses
• 親書誌ID:
  • BA01323290