Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

Author(s)

    • International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
    • Kittler, M.
    • Richter, H.

Bibliographic Information

Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

editors, M. Kittler and H. Richter

(Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 19 & 20)

Sci-Tech Publications, 1991

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Details

  • NCID
    BA13437989
  • Country Code
    lh
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Vaduz
  • Pages/Volumes
    650 p.
  • Size
    25 cm
  • Parent Bibliography ID
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