Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Kittler, M.
• Richter, H.

書誌事項

Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

editors, M. Kittler and H. Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 19 & 20）

Sci-Tech Publications, 1991

詳細情報

• NII書誌ID(NCID): BA13437989
• 出版国コード: lh
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Vaduz
• ページ数/冊数: 650 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800