IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts

Author(s)

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts

Institute of Electrical and Electronics Engineers , Additional copies may be purchased from IEEE Service Center, c1991

• : soft.
• : case.
• : micro.

Other Title

91CH30429

Note

"sponsored by: Semiconductor Equipment and Materials International, Institute of Electrical and Electronics Engineers, Inc.(IEEE), IEEE Electron Devices Society, IEEE Components, Hybrids and Manufacturing Technology Society"--cover

Includes bibliographical references

"IEEE catalog number 91CH3042-9"--T.p. verso

Details

• NCID: BA13832699
• ISBN:
  • 0780301528
  • 0780301536
  • 0780301544
• LCCN: 91072812
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York, NY, U.S.A.,Piscataway, NJ, USA
• Pages/Volumes: x, 212 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Electronic industries -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Computer integrated manufacturing systems -- Congresses