X-Ray lithography research : a collection of NRL contributions

Author(s)

• Whitlock, Robert R.
• Naval Research Laboratory (U.S.)

Bibliographic Information

X-Ray lithography research : a collection of NRL contributions

ed by Robert R. Whitlock

（NRL memorandum report, 5731）

Naval Research Laboratory, 1987

Details

• NCID: BA13845191
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, DC
• Pages/Volumes: xiv, ca.172 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA13845679