Ion implantation in semiconductors : science and technology : proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974

Author(s)

• International Conference on Ion Implantation in Semiconductors and Other Materials
• Namba, Susumu

Bibliographic Information

Ion implantation in semiconductors : science and technology : proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974

edited by Susumu Namba

Plenum Press, 1975

Note

Includes bibliographical references and indexes

Details

• NCID: BA1387559X
• ISBN:
  • 030630841X
• LCCN: 75008985
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xv, 742 p.
• Size: 26 cm
• Classification:
  • LCC : TK7871.85
  • DC : 621.3815/2/028
• Subject Headings:
  • LCSH : Ion implantation -- Congresses
  • LCSH : Semiconductors -- Effect of radiation on -- Congresses
  • LCSH : Metals -- Effect of radiation on -- Congresses