Lasers in microlithography : 2-3 March 1987, Santa Clara, California

著者

• Ehrlich, Daniel J.
• Tsao, Jeffrey Y.
• Batchelder, John Samuel
• Society of Photo-optical Instrumentation Engineers

書誌事項

Lasers in microlithography : 2-3 March 1987, Santa Clara, California

Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 774）

The Society, c1987

• pbk.

注記

Errata slip inserted

Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors

Includes bibliographical references and index

• NII書誌ID(NCID): BA14030761
• ISBN:
  • 0892528095
• LCCN: 87060742
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: v, 192 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA1673
  • DC20 : 621.381/531
• 件名:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X