Lasers in microlithography : 2-3 March 1987, Santa Clara, California

Author(s)

• Ehrlich, Daniel J.
• Tsao, Jeffrey Y.
• Batchelder, John Samuel
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Lasers in microlithography : 2-3 March 1987, Santa Clara, California

Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 774）

The Society, c1987

• pbk.

Note

Errata slip inserted

Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors

Includes bibliographical references and index

Details

• NCID: BA14030761
• ISBN:
  • 0892528095
• LCCN: 87060742
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: v, 192 p.
• Size: 28 cm
• Classification:
  • LCC : TA1673
  • DC20 : 621.381/531
• Subject Headings:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X