Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah

著者

• Pfefferkorn Conference
• Schou, Jørgen

書誌事項

Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah

edited by Jørgen Schou, Pieter Kruit, Dale E. Newbury ; managing editors, Ram A. Sharma and Om Johari

（Scanning microscopy. Supplement, 4）

Scanning Microscopy International, c1990

詳細情報

• NII書誌ID(NCID): BA14040845
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Chicago (AMF O'Hare), Ill.
• ページ数/冊数: 378 p.
• 大きさ: 29 cm
• 親書誌ID:
  • BA14256618