Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah

Author(s)

• Pfefferkorn Conference
• Schou, Jørgen

Bibliographic Information

Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah

edited by Jørgen Schou, Pieter Kruit, Dale E. Newbury ; managing editors, Ram A. Sharma and Om Johari

（Scanning microscopy. Supplement, 4）

Scanning Microscopy International, c1990

• NCID: BA14040845
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Chicago (AMF O'Hare), Ill.
• Pages/Volumes: 378 p.
• Size: 29 cm
• Parent Bibliography ID:
  • BA14256618