Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

Author(s)

• Rana, Virendra Vir Singh
• Joshi, Rajiv V.
• 大泊, 巌 オオドマリ, イワオ
• University of California, Berkeley. Continuing Education in Engineering
• Advanced Metallization for ULSI Applications Conference

Bibliographic Information

Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors: Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.]

（Materials Research Society conference proceedings）

Materials Research Society, c1992

Note

Contains papers presented at the Advanced Metallization for ULSI Applications Conference

Includes bibliography and index

Details

• NCID: BA14203167
• ISBN:
  • 1558991522
• LCCN: 92213162
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa
• Pages/Volumes: xv, 580 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA07468230