Physics of submicron devices
著者
書誌事項
Physics of submicron devices
(Microdevices : physics and fabrication technologies)
Plenum Press, c1991
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
A compendium of otherwise scattered information on the physics involved in the construction and operation of semiconductor devices at the submicron level. Addressed to people who make such devices, and assumes a solid understanding of solid state physics and electronics, and at least a familiarity w
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