Film deposition by plasma techniques

Author(s)

• 小沼, 光晴 コヌマ, ミツハル

Bibliographic Information

Film deposition by plasma techniques

Mitsuharu Konuma

（Springer series on atoms + plasmas, 10）

Springer-Verlag, c1992

• : Germany
• : New York

Other Title

プラズマと成膜の基礎

Note

Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref

Includes bibliographical references and index

Details

• NCID: BA14397573
• ISBN:
  • 3540540571
  • 0387540571
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin ; Tokyo
• Pages/Volumes: ix , 224 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.15.F5
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Thin films
  • LCSH : Plasma-enhanced chemical vapor deposition
• Parent Bibliography ID:
  • BA00045760