Film deposition by plasma techniques
Author(s)
Bibliographic Information
Film deposition by plasma techniques
（Springer series on atoms + plasmas, 10）
Springer-Verlag, c1992
- : Germany
- : New York
- Other Title
-
プラズマと成膜の基礎
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Note
Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref
Includes bibliographical references and index
