Proceedings of the Symposia on Patterning Science and Technology II Interconnection and Contact Metallization for ULSI

著者

• International Symposium on Patterning Science and Technology
• Greene, Wayne
• Hefferon, George J.
• White, L. K.
• Herndon, Terry O.
• Wu, Andrew L.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu

（Proceedings / [Electrochemical Society], v. 92-6）

Electrochemical Society, c1992

詳細情報

• NII書誌ID(NCID): BA14411867
• ISBN:
  • 1566770076
• LCCN: 92071002
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 382 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290