Proceedings of the Symposia on Patterning Science and Technology II Interconnection and Contact Metallization for ULSI

Author(s)

• International Symposium on Patterning Science and Technology
• Greene, Wayne
• Hefferon, George J.
• White, L. K.
• Herndon, Terry O.
• Wu, Andrew L.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu

（Proceedings / [Electrochemical Society], v. 92-6）

Electrochemical Society, c1992

Details

• NCID: BA14411867
• ISBN:
  • 1566770076
• LCCN: 92071002
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 382 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290