Proceedings of the seventh symposium on automated integrated circuits manufacturing

著者

• Akins, Vaughn E.
• ハラダ, ヒロユキ
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the seventh symposium on automated integrated circuits manufacturing

edited by Vaughn E. Akins, Hiroyuki Harada ; Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], 92-8）

Electrochemical Society, c1992

詳細情報

• NII書誌ID(NCID): BA14412407
• ISBN:
  • 1566770041
• LCCN: 92070529
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 283 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290