Plasma polymerization processes
著者
書誌事項
Plasma polymerization processes
（Plasma technology, 3）
Elsevier , Distributors for the United States and Canada: Elsevier Science, 1992
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The aim of this book is to show how to make useful plasma polymerization processes resulting in polymeric (organic) materials - usually thin films of the desirable properties. The main emphasis is on the detailed discussion of the deposition apparatus, deposition parameters and properties of the obtained films. The historical background and the processes related to plasma polymerization are discussed. Fundamentals of plasma physics and plasma chemistry are concisely reviewed and used as a base for the explanation of plasma polymerization principles and its models. Special attention is devoted to the real plasma polymerization reactors and various polymer film deposition arrangements. Many technical details are examined including the influence of process parameters on the properties of the resulting plasma polymers. New systems based on a microwave discharge are also described. The properties of the most important plasma polymers - plasma polymerized organosilicons, halocarbons and composite metal/plasma polymers are reviewed. Finally, the applications of plasma polymers are presented, e.g.
目次
1. Introduction. Historical background. Plasma polymerization and related processes of polymer film formation. 2. Fundamentals of Plasma Physics. Electrical breakdown in a gas and the d.c. glow discharge. Characterization of low temperature plasma generated by a glow discharge. Radio frequency and microwave discharges. 3. Fundamentals of Plasma Chemistry. Reactions in a plasma volume. Reactions on adjacent surfaces. 4. Fundamentals of Plasma Polymerization. Basic deposition arrangements for plasma polymerization. Kinetic models of plasma polymerization. General description of plasma polymer films. 5. Applied Systems for Plasma Polymerization and Classification of Plasma Polymers. Applied plasma polymerization systems. Main groups of plasma polymers. Hard polymer and hard carbon films. Metal-containing organic films. 6. Properties and Application of Plasma-Polymerized Films. Protective coatings. Optical, electrical and magnetic properties. Permselective membranes. Biomedical applications. Modifications of conventional polymer materials by plasma treatment. 7. Potential Applications in Microelectronics. Passivation and protective coatings. Active elements in electronics. Plasma polymerized photoconductive films. Concluding note. References. Appendix. Index.
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