Contamination control and cleanrooms : problems, engineering solutions, and applications

著者

• Lieberman, Alvin

書誌事項

Contamination control and cleanrooms : problems, engineering solutions, and applications

Alvin Lieberman

Van Nostrand Reinhold, c1992

• NII書誌ID(NCID): BA17174305
• ISBN:
  • 0442005741
• LCCN: 91044921
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York, N.Y.
• ページ数/冊数: viii, 411 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TH7694
  • DC20 : 620.8/6
• 件名:
  • LCSH : Clean rooms
  • LCSH : Decontamination (from gases, chemicals, etc.)