Diagnostics and applications of thin films : proceedings of the international summer school, 27th May-5th June 1991, Chlum u Třeboně, Czechoslovakia
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書誌事項
Diagnostics and applications of thin films : proceedings of the international summer school, 27th May-5th June 1991, Chlum u Třeboně, Czechoslovakia
Institute of Physics Pub., c1992
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
In an area of ever increasing interest, this volume comprises the invited papers from well known and respected workers in the field. It covers the characterization of thin films using a variety of techniques including scanning electron microscopy, scanning tunnelling microscopy, transmission electron microscopy, x-ray diffraction and electron probe microanalysis.
The main applications of this specialized field in sensors, hard coatings and microelectronics are discussed.
目次
Transmission electron microscopy. Electron probe microanalysis of thin films. Low energy electron microscopy (abstract). Electron energy loss spectroscopy. Structural surface measurements by backscattered electrons. The Fourier transform of lattices. X-ray diffraction structure analysis of thin films. Scanning tunnelling microscopy. SIMS of thin films (abstract). Industrial film thickness measurements and methods. Structure of discontinuous films: RHEED investigations (abstract). Catalysis on island films (abstract). Thin film sensors. Amorphous, microcrystalline and epitaxial silicon: preparation, characterization and properties. Semiconductor layers and interfaces in microelectronics (abstract). Thin film analysis using electrons and ions: structural and compositional analysis by combination of microscopy and spectroscopy. Crystal growth and recrystallization in thin A1 films.
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