Thin film resistive sensors
著者
書誌事項
Thin film resistive sensors
(Sensors series)
Institute of Physics Publishing, c1992
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book provides a complete overview of thin film resistive sensors.devoted to thin-film devices. Each type of input energy is discussed in a separate chapter. Detailed descriptions are given of the materials, properties, structure and principles of operation of the sensors as well as their main applications. Results of the authors' research and comprehensive reviews of the current literature are included. The scope of this book and its accessible style make it a valuable reference work to graduate scientists and engineers in many disciplines.
Written for scientists and engineers using or developing thin film sensors.
目次
- Introduction: 3-D representation of sensors and actuators: Introduction
- Information and information processing systems
- Information transduction in transducers
- 3-D representation of transducers - the "sensor effect cube"
- Conclusions and future outlook on sensors
- References. Photoresistive sensors Section A: Photoresistive sensors with polycrystalline thin films: Introduction
- Photoconductivity in thin polycrystalline films
- Polycrystalline semiconductors for photoresistive sensors
- Structures and principles of operation
- Applications. Photoresistive sensors section B: Photoresistive sensors with amorphous thin films: Electronic transport in amorphous semiconductors
- Amorphous semiconductors for photoresistive sensors
- Structures and principles of operation
- Applications
- Future trends
- References. Piezoresistive sensors: Piezoresistive effects in bulk material
- Piezoresistive effects in thin films
- Structures and principles of operation
- Applications
- References. Thermoresistive sensors: Introduction
- Resistivity in thin metal films
- Temperature coefficient of resistance
- Structures and principles of operation
- Applications
- References. Magnetoresistive sensors: Introduction
- Anisotropic magnetoresistance in ferromagnetic alloys
- Galvanomagnetic properties of thin ferromagnetic films
- Structures and principles of operation
- Applications
- References. Chemoresistive gas sensors: Surface states in semiconductors
- Semiconducting metal oxides as chemoresistive gas sensors
- Structures and principles of operation
- Applications
- References
- Index.
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