Introduction to semiconductor device yield modeling
著者
書誌事項
Introduction to semiconductor device yield modeling
（The Artech House materials science library）
Artech House, c1992
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This text, the first of its kind, delivers a systematically organized introduction to the theory and practice of yield prediction. The book addresses the economic need for accurate yield prediction, and clarifies the important role it plays in the semiconductor industry.
目次
Yield. Fault Probability. Effect of Defect Sizes on the Fault Probability. Counting Techniques. Yield Equations. Defect Density and Scaling Rules. Yield Prediction. Yield With Redundancy. A Yield Comparison. Productivity. Conclusion. References.
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