Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989

Author(s)

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Kittler, M.

Bibliographic Information

Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989

edited by M. Kittler

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 6 & 7）

Sci-Tech Publications, 1989

Details

• NCID: BA18733242
• ISBN:
  • 3908044049
• Country Code: lh
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Vaduz
• Pages/Volumes: xi, 607 p.
• Parent Bibliography ID:
  • BA07841800