Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Kittler, M.

書誌事項

Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989

edited by M. Kittler

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 6 & 7）

Sci-Tech Publications, 1989

詳細情報

• NII書誌ID(NCID): BA18733242
• ISBN:
  • 3908044049
• 出版国コード: lh
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Vaduz
• ページ数/冊数: xi, 607 p.
• 親書誌ID:
  • BA07841800