Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.
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書誌事項
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.
(Materials Research Society symposium proceedings, v. 262)
Materials Research Society, c1992
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注記
Includes bibliographical references and index