Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.

書誌事項

Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.

editors, S. Ashok ... [et al.]

(Materials Research Society symposium proceedings, v. 262)

Materials Research Society, c1992

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注記

Includes bibliographical references and index

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