Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.

著者

• Materials Research Society. Spring Meeting
• Grabowski, Kenneth S.

書誌事項

Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.

editors, Kenneth S. Grabowski ... [et al.]

（Materials Research Society symposium proceedings, v. 268）

Materials Research Society, c1992

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA18856129
• ISBN:
  • 1558991638
• LCCN: 92026483
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, PA
• ページ数/冊数: xiii, 405 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Plasma etching -- Congresses
  • LCSH : Ion bombardment -- Congresses
  • LCSH : Thin films -- Congresses
• 親書誌ID:
  • BA00013775