The role of microscopy in semiconductor failure analysis
著者
書誌事項
The role of microscopy in semiconductor failure analysis
（Microscopy handbooks, 25）（Oxford science publications）
Oxford University Press : Royal Microscopical Society, 1992
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注記
Includes bibliographical references (p. [98]-101) and index
内容説明・目次
内容説明
This handbook describes the applications of microscopy to semiconductor failure analysis, and should be a useful practical guide for all those working in the field. The basic principles of each type of microscopy are explained, and each is illustrated with case histories and micrographs of many failure mechanisms.
目次
- Rationale and methodology of failure analysis
- primary instruments and their applications
- microscopes of the future
- choosing the appropriate microscopy technique(s).
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